Features
- Storage of different transport containers (FOUP, FOSB)
- Fulfils ISO class 5 cleanroom class
- IO-ports:
- Manual I/O ports (rotary gate)
- Automatic I/O ports (OHT connection)
- Connection to equipment possible
- Dockingstation for transport trolley / cart
- SEMI-E88 MCS interface
- SEMI-E84 transfer interface
Technical data
- Medium cycle time: 20 - 25 sec.
- Dimensions:
- Height: 6,1 m
- Width: 2,75 m
- Length: Max 47 m
- SIEMENS S7 PLC
Datasheet
Software

- Remote access: Web front-end including user administration
- Data tracking: Material tracking, system counter visualisation
- SECS interface: SEMI E88-conformant interface, expandable upon request by the customer
- Interfaces:
- Web frontend via http Port 80
- SECS/GEM Ethernet interface
- Ethernet interface to the PLC systems
- Inventory function
- Optional 3D inventory visualisation

Warehouse management system
Schiller SWarePro