Radial Stocker

Schiller’s Radial Stocker provides a storage system that’s both efficient and space-saving for innovative expansion and improvement of demanding cleanroom intra-logistics.

Features

  • Storage of different transport containers (Box HA200, OC)
  • Fulfils ISO class 3 cleanroom class
  • Storage and retrieval to external conveyor technology
  • Manual and automatic I/O ports available
  • High storage density for 8 inch wafers
  • SEMI-E88 MCS interface
  • SEMI-E84 transfer interface 

Technical data

  • Average cycle time < 28s
  • 11 storage spaces per lane
  • High: variable between 7 and 12 lanes (2,800 mm - 4,200 mm)
  • Outside dimensions: 1,800 mm x 1,800 mm base area
  • All robotic axes are delivered with absolute value encoders combined with Faulhaber MC controllers
  • SIEMENS PLC
  • Desktop PC, Win10, 17” panel
  • PROGEA MOVICON high-end visualisation

Software

Radial Stocker Software
  • Remote access: Web front-end including user administration
  • Data tracking: Material tracking, system counter visualisation
  • SECS interface: SEMI E88-conformant interface, expandable upon request by the customer
  • Interfaces:
      • Web frontend via http Port 80
      • SECS/GEM Ethernet interface
      • Ethernet interface to the PLC systems

Special features

  • Inventory function
  • Optional 3D inventory visualisation

Warehouse management system

Schiller SWarePro