Radial Stocker
Schiller’s Radial Stocker provides a storage system that’s both efficient and space-saving for innovative expansion and improvement of demanding cleanroom intra-logistics.
Features
- Storage of different transport containers (Box HA200, OC)
- Fulfils ISO class 3 cleanroom class
- Storage and retrieval to external conveyor technology
- Manual and automatic I/O ports available
- High storage density for 8 inch wafers
- SEMI-E88 MCS interface
- SEMI-E84 transfer interface
Technical data
- Average cycle time < 28s
- 11 storage spaces per lane
- High: variable between 7 and 12 lanes (2,800 mm - 4,200 mm)
- Outside dimensions: 1,800 mm x 1,800 mm base area
- All robotic axes are delivered with absolute value encoders combined with Faulhaber MC controllers
- SIEMENS PLC
- Desktop PC, Win10, 17” panel
- PROGEA MOVICON high-end visualisation
Software
- Remote access: Web front-end including user administration
- Data tracking: Material tracking, system counter visualisation
- SECS interface: SEMI E88-conformant interface, expandable upon request by the customer
- Interfaces:
• Web frontend via http Port 80
• SECS/GEM Ethernet interface
• Ethernet interface to the PLC systems
Special features
- Inventory function
- Optional 3D inventory visualisation
Warehouse management system
Schiller SWarePro